Ion implantation productivity improvement method

摘要

A method of processing a workpiece is disclosed, which method first coats an ion chamber with a desired dopant species and other species. Following this conditioning process, a feed gas containing fluorine and the desired dopant species is introduced into the chamber and ionized. Thereafter, ions are extracted from the chamber, accelerated toward the workpiece, and first injected into the workpiece without mass analysis. Said other species used during the conditioning process may be Group 3, 4 or 5 elements. The desired dopant species can be boron.