System and method for monitoring the flow rate of a mass flow controller in real time

摘要

A mass flow controller is configured and arranged to measure a mass flow through the mass flow controller and a first flow meter configured and arranged to measure the mass flow through the mass flow controller. Responsive to a control signal generated in response to a flow rate measured by a second flow meter and one of the flow meters, configured and arranged to control a mass flow rate through the mass flow controller. A control valve and generating the control signal and providing an indication if the difference between the mass flow rate measured by the first flow meter and the mass flow rate measured by the second flow meter exceeds a threshold And a system control unit configured and arranged.