首页> 外国专利> Detector array device comprising a bolometric detector and the detector of electromagnetic radiation in the terahertz region

Detector array device comprising a bolometric detector and the detector of electromagnetic radiation in the terahertz region

机译:探测器阵列设备,包括辐射热探测器和太赫兹区域中的电磁辐射探测器

摘要

The detector (100) has a thermometric element (128) coupled with a resistive load (116). A reflective assembly comprises a reflective layer (132) for electromagnetic radiation. An insulating material layer (130) is formed on the reflective layer. A periodic array (104) of metallic patterns is formed on the insulating material layer, where pitch and filing factor of the array are selected to obtain a constructive interference at a level of a micro-bridge (106) between the detected incident radiation and the radiation reflected by the reflective assembly.
机译:检测器(100)具有与电阻负载(116)耦合的测温元件(128)。反射组件包括用于电磁辐射的反射层(132)。在反射层上形成绝缘材料层(130)。在绝缘材料层上形成金属图案的周期性阵列(104),在其中选择阵列的间距和填充因子,以获得在检测到的入射辐射与入射光之间的微桥(106)处的相长干涉。反射组件反射的辐射。

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