Testing apparatus of the electrical characteristics of the test object with the inspection method and the bump electrode of the electrical characteristics of the test object with a bump electrode

摘要

PROBLEM TO BE SOLVED: To stably measure electrical characteristics of a plurality of inspection objects.SOLUTION: A bump electrode inspection method comprises: a first measurement step of, for one part of a plurality of inspection objects, measuring electrical characteristics of the inspection objects in such a state that a bump electrode 12 is in contact with a contactor 112 at its predetermined first position while pressing the inspection target against an inspection circuit board; and a second measurement step of, for another part of the plurality of inspection objects, measuring electrical characteristics of the inspection objects in such a state that the bump electrode 12 is in contact with the contactor 112 at its second position of which at least one part does not overlap with the first position of the contactor 112, while pressing the inspection object against the inspection circuit board.