SURFACE PROFILE DISTORTION MEASUREMENT DEVICE AND MEASUREMENT METHOD OF SURFACE PROFILE DISTORTION

摘要

PROBLEM TO BE SOLVED: To provide a surface profile distortion measurement device capable of measuring a fine surface profile distortion in a wide range and hardly affected even by variation of the installation distance of an object to be measured and a measurement method of a surface profile distortion.SOLUTION: A surface profile distortion measurement device includes: an illumination source 3 for illuminating linear diffusion light on a surface 2 to be measured; a camera 4 for photographing a regular reflection image by the surface to be measured that fixes a relative position to the illumination source; image processing means for detecting a relative inclination of each reflection point by the photographed regular reflection image; a movement mechanism 6 for moving on an axis by mounting the illumination source 3 and the camera 4; and an encoder for outputting a moving amount. The surface profile distortion measurement device includes means for calculating curvature from the change of the inclination by detecting the inclination of each reflection point by performing in order the photographing while being moved by the movement mechanism 6, and means for displaying the distribution of the curvature of the calculated surface to be measured. The image processing means, the calculation means of the curvature, the display means of the curvature distribution are incorporated into a personal computer 5.SELECTED DRAWING: Figure 1