Electric field type time grating angular displacement sensor

摘要

An electric field type time grating angular displacement sensor is provided.SOLUTION: A biosine-shaped electrode (1-1) equally spaced along the circumference is arranged on the surface of a rotor substrate (1) with a rotor and a stator. The stator substrate (2) has a fan-shaped or curved rectangular shaped electrode (2-1) uniformly arranged along the circumference, a stator conductor at the bottom of the electrode (2-1) 2-1) and the conductive wire, and the surface of the electrode (2-1) is covered with an insulating protective layer to form a multilayer structure. The rotor substrate (1) and the stator substrate (2) are attached coaxially and are separated by a constant interval . The rotor substrate (1) rotates relatively around the axis. Four electrodes within one period of the stator are connected to a sinusoidal excitation voltage of equal amplitude and equal frequency of 0 , 90 , 180 , 270 phase, respectively, and on the rotor electrode (1-1) And the phase of the same frequency reference signal Ur fixed to the phase of one path are compared with each other. The phase difference between the signals of both paths is indicated by interpolated clock pulses and the angular displacement is obtained by conversion. This displacement sensor is simple in structure, low in power consumption, reduces the required mounting accuracy of the machine, and can arbitrarily measure angular displacement arbitrarily within the range of 360 .(A)