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METHOD FOR MANUFACTURING MULTILAYERED PIEZOELECTRIC DEVICE, MULTI-LAYER PIEZOELECTRIC DEVICE INCLUDING SUPPORTING AG
METHOD FOR MANUFACTURING MULTILAYERED PIEZOELECTRIC DEVICE, MULTI-LAYER PIEZOELECTRIC DEVICE INCLUDING SUPPORTING AG
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机译:制造多层压电装置的方法,包括支持股份公司的多层压电装置
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摘要
Provision is made of a method for producing a piezoelectric multilayer component (1), in which piezoelectric green sheets, at least one ply (21) containing an auxiliary material having a first and a second component and layers (20) containing electrode material are arranged one above another alternately and sintered, wherein, during the sintering, the first and second components of the auxiliary material chemically react, and the at least one ply (21) containing the auxiliary material is degraded. In addition, provision is made of a piezoelectric multilayer component (1) comprising a plurality of alternating layers of electrode material (20) and piezoelectric ceramic and at least one layer (21) of auxiliary material having a breaking load which is reduced compared to the other layers of electrode material, wherein, in addition to the first and second components, the auxiliary material comprises a fifth component, which, at the preferred sintering temperatures for the piezoelectric material, in particular at most 1050° C., at most has a negligible sintering activity and does not react with the piezoelectric material used. Finally, the use of ZrO2, BaTiO3 or a mixture thereof in the auxiliary material layer of a piezoelectric multilayer component for reducing the breaking stress is described.
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