CHECKUP APPARATUS FOR PRECISION COMPONENTS, AND CHECKUP METHOD FOR PRECISION COMPONENTS

摘要

PROBLEM TO BE SOLVED: To provide a novel checkup apparatus and method for precision components that serve to enhance safety by preventing, even if the pressure vessel worked on is broken, pieces of the broken pressure vessel from being extensively scattered.;SOLUTION: Liquid is used as the pressure medium for applying pressure on precision components housed in a pressure vessel. The use of liquid as the pressure medium in this configuration, even if the pressure vessel is discarded, restrains scattering of broken pieces of the pressure vessel because the expansion of liquid is far smaller than that of gas, and thereby significantly contributes to the safety of the checkup apparatus.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2017,JPO&INPIT