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Referring leak generator and the super-fine leak test apparatus using the same
Referring leak generator and the super-fine leak test apparatus using the same
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机译:检漏仪和使用该检漏仪的超细检漏装置
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摘要
There is provided a reference leak generating device capable of precisely generating an ultra-fine reference leak. The reference leak generating device adapted to be connected to an upstream side of a measurement chamber includes a chamber connected to the measurement chamber through an orifice or a porous plug having a molecular flow conductance C and a pressure to establish molecular flow conditions which are known in advance, and is characterized in that a pressure p 1 of testing gas to be introduced into the chamber is precisely determined by using a static expansion method once or more times, and a leak rate of a reference leak at the pressure p 1 is obtained in accordance with a product of C and P 1 .
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