Breaking method for breaking apparatus and laminated brittle material substrate of the laminated brittle material substrate

摘要

PROBLEM TO BE SOLVED: To provide a break device of a laminated fragile material substrate and a break method of the laminated fragile material substrate, capable of surely breaking the laminated fragile material substrate together with a layer composed of resin or metal.;SOLUTION: In a break bar 14, an abutting part with the substrate 100 has a blade shape composed of an angle θ of 45 degrees or less. The angle θ at a tip of this break bar 14 is desirably 35 degrees or less, and is further desirably 25 degrees or less. When breaking the substrate 100, the break bar 14 is pushed against along a scribe line 99 from a main surface on the side of adding a layer 103 composed of a resin or a metal, and thereby, the layer 103 composed of the resin or the metal is cut, and the substrate 100 is broken.;COPYRIGHT: (C)2014,JPO&INPIT