Foreign matter removal tool and foreign matter removal method

摘要

PROBLEM TO BE SOLVED: To provide a foreign matter removal tool and method capable of extending service life of a holding table which has a double-concave shape.SOLUTION: A foreign matter removal tool 10 comprises a holding surface 4a formed of a circular ceramic for holding a workpiece, in which the holding surface is curved into a recess-shape from a center to an outer periphery thereof, and the tool removes the foreign matter from the holding surface of a holding table 4 which rotatably drives around a center of the holding surface as a rotation axial line Co. The foreign matter removal tool further comprises: a circular grind stone part 12 formed of a disk-shaped grind stone 12a formed to have outer diameter Dw equal to radius Rt of the holding surface of the holding table; a movable part for positioning the circular grind stone part 12 to a radius area 4f between the center of the holding surface of the holding table and an outer peripheral edge of the holding surface; and a circular grind stone holding part rotatably connected to a lower end of the movable part, and holding the circular grind stone part on a lower part thereof. A material of a surface contacting the holding surface of the holding table of the circular grind stone part is formed of a material having bend intensity smaller than that of the ceramic of the holding surface.