Ultrasonic wave generating element, ultrasonic wave generating device and method of manufacturing ultrasonic wave generating element

摘要

An ultrasonic wave generating element which is compact and hardly cracked or the like is provided. An ultrasonic wave generating element (11) for generating ultrasonic waves using a buckling vibration fork oscillation mode in which first oscillator (12) and second oscillator (13) oscillate with the same frequency and in opposite phases, the ultrasonic generating element First and second protrusions 18 and 19 are provided around the excitation region on the first and second main faces 14 a and 14 b of the first diaphragm 14 of the transducer 12 of the second transducer 12, , In the first and second main faces 20a and 20b of the second diaphragm 20, third and fourth protrusions 24 and 25 are provided around the excitation region, and the second The ultrasonic wave generating element 11 in which the protruding portion 19 and the third protruding portion 24 are joined and the first vibrator 12 is laminated on the second vibrator 13.