Resonance type high frequency power supply device and switching circuit for resonance type high frequency power supply device

摘要

A resonance type high-frequency power supply device including a power element for performing a switching operation, wherein the power element and at least one second power element connected in parallel to the power element so as to optimize the parasitic capacitance thereof; A high-frequency pulse drive circuit 1 that sends a high-frequency pulsed voltage signal exceeding 2 MHz to the power element and the second power element to drive the power element and the second power element is provided.