AUTOMATIC CONTROL OF SPRAY BAR AND UNITS FOR CHEMICAL MECHANICAL POLISHING IN-SITU BRUSH CLEANING

摘要

A method and apparatus are provided for automatically controlling the position of the spray bars and nozzles and the spray flow of a CMP in-situ cleaning module. Embodiments include fixing a wafer to a CMP cleaning module, the cleaning module having a first and a second group of spray bars and nozzles, the first and second groups of spray bars and nozzles being located proximate to opposite surfaces of the wafer; cleaning one or more of the surfaces of the wafer with a chemical spray forced through at least one of the groups of spray bars and nozzles; determining a measured profile of the one or more surfaces of the wafer; comparing the measured profile against a target profile; and adjusting automatically at least one of the first and second groups of spray bars and nozzles relative to the one or more surfaces of the wafer based on the comparison.