DOUBLE BALL-BAR MEASURING SYSTEM AND ERRORS COMPENSATION METHOD THEREOF

摘要

A double ball-bar measuring system includes a calibration unit, at least two double ball-bars and a measuring module. Among the double ball-bars, at least one is a measuring double ball-bar and at least one is a reference double ball-bar. The measuring double ball-bar is installed on a measurement apparatus to measure or calibrate a target machine. The reference double ball-bar is disposed on the calibration unit to measure thermal errors. When the target machine is driven for measurement or calibration, the geometric and thermal errors of the measuring double ball-bar are compensated so that the measurement apparatus can achieve highly accurate measurement.