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MICRO-ELECTROMECHANICAL TEMPERATURE CONTROL SYSTEM WITH THERMAL RESERVOIR
MICRO-ELECTROMECHANICAL TEMPERATURE CONTROL SYSTEM WITH THERMAL RESERVOIR
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机译:带储热器的微机电温度控制系统
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摘要
A micro-electromechanical temperature control system including a micro-electromechanical apparatus is provided. The micro-electromechanical apparatus includes a heater and a thermal reservoir. A specific heat capacity of the thermal reservoir is greater than a specific heat capacity of the heater, so that a heating time and a heating frequency of the heater are reduced to save electrical power consumption. The micro-electromechanical temperature control system is adapted for a micro-electromechanical sensor that is required to be controlled at an operating temperature, such as a gas sensor.
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