MACRO-MICRO INTEGRATED COMPOUND PLATFORM WITH ADJUSTABLE DYNAMIC CHARACTERISTICS

摘要

The present invention proposes a macro-micro integrated compound platform with adjustable dynamic characteristics. When a macro platform mover and a micro platform mover are driven at the same time, the whole large-scale high-speed motion can be realized; when a motion deviation occurs, a micro motion platform can be driven separately to realize the high-frequency motion deviation compensation, because the micro motion platform has small inertia and zero friction and achieves precision displacement output through elastic deformation. The macro-micro integrated compound platform can realize high-speed precision motion through compound motion control, is mounted and used in a manner consistent with the traditional platform, and is convenient to be popularized and applied; a stiffness and frequency adjustment mechanism and a variable damper are arranged, so that the micro motion platform can transfer the motion of a macro motion platform and isolate the vibration at any frequency, and realize high-precision displacement compensation; meanwhile, damping of the variable damper is matched with the stiffness and frequency parameters to ensure the high-precision displacement compensation at any frequency and increase the range of working frequency.