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THERMAL SPRAY COATING, MEMBER FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT, FEEDSTOCK MATERIAL FOR THERMAL SPRAY, AND METHOD FOR PRODUCING THERMAL SPRAY COATING
THERMAL SPRAY COATING, MEMBER FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT, FEEDSTOCK MATERIAL FOR THERMAL SPRAY, AND METHOD FOR PRODUCING THERMAL SPRAY COATING
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机译:热喷涂涂层,半导体制造设备的成员,用于热喷涂的进料材料以及生产热喷涂涂层的方法
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摘要
A thermal spray coating according to the present invention contains mainly magnesium, aluminum, oxygen, and nitrogen and has, as a main phase, a crystal phase of a MgO—AlN solid solution in which aluminum nitride is dissolved with magnesium oxide. The thermal spray coating is obtained by thermal spray of powder of a ceramic material containing mainly magnesium, aluminum, oxygen, and nitrogen and having, as a main phase, a crystal phase of a MgO—AlN solid solution in which aluminum nitride is dissolved with magnesium oxide.
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