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COLOR SPLITTER STRUCTURE, METHOD OF MANUFACTURING THE SAME, IMAGE SENSOR INCLUDING COLOR SPLITTER STRUCTURE, AND OPTICAL APPARATUS INCLUDING IMAGE SENSOR
COLOR SPLITTER STRUCTURE, METHOD OF MANUFACTURING THE SAME, IMAGE SENSOR INCLUDING COLOR SPLITTER STRUCTURE, AND OPTICAL APPARATUS INCLUDING IMAGE SENSOR
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机译:颜色分割器结构,相同的制造方法,包括颜色分割器结构的图像传感器以及包括图像传感器的光学仪器
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摘要
Provided are color splitter structures, methods of manufacturing the color splitter structures, image sensors including the color splitter structures, methods of manufacturing the image sensors, and optical apparatuses including the image sensors. A color splitter may include a plurality of color splitter elements configured to divide an incident light into a plurality of exit lights according to wavelengths, and at least one of the color splitter elements may include a first element portion; a second element portion disposed to shift to the first element portion so as to partially overlap with the first element portion; and an etch stop layer provided between the first and second element portions.
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