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Method of performing tomographic imaging of a sample in a charged-particle microscope
Method of performing tomographic imaging of a sample in a charged-particle microscope
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机译:在带电粒子显微镜中对样品进行层析成像的方法
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摘要
The invention relates to a method of performing tomographic imaging involving repeatedly directing a charged particle beam through a sample for a series of sample tilts to acquire a corresponding set of images and mathematically combining the images to construct a composite image. The latter of which consists of, at each of a second series of sample tilts, using a spectral detector to accrue a spectral map of said sample, thus acquiring a collection of spectral maps; analyzing said spectral maps to derive compositional data of the sample; and employing said compositional data in constructing said composite image.
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