Charged-particle microscope providing depth-resolved imagery

摘要

A method of examining a sample using a charged-particle microscope, comprising mounting the sample on a sample holder; using a particle-optical column to direct at least one beam of particulate radiation onto a surface S of the sample, thereby producing an interaction that causes emitted radiation to emanate from the sample; using a detector arrangement to detect at least a portion of said emitted radiation, the method of which comprises embodying the detector arrangement to detect electrons in the emitted radiation; recording an output O_n of said detector arrangement as a function of kinetic energy E_n of said electrons, thus compiling a measurement set M={(O_n, E_n)} for a plurality of values of E_n; using computer processing apparatus to automatically deconvolve the measurement set M and spatially resolve it into a result set R={(V_k, L_k)}, in which a spatial variable V demonstrates a value V_k at an associated discrete depth level L_k referenced to the surface S, whereby n and k are members of an integer sequence, and spatial variable V represents a physical property of the sample as a function of position in its bulk.