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Probing method, probe card for performing the method, and probing apparatus including the probe card
Probing method, probe card for performing the method, and probing apparatus including the probe card
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机译:探测方法,用于执行该方法的探测卡以及包括该探测卡的探测装置
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摘要
A probe method includes setting an allowable temperature range, the allowable temperature range including a test temperature and ensuring contact between a pad of a circuit substrate and a needle of a probe card, providing the probe card with a temperature within the allowable temperature range, contacting the needle of the probe card to the pad of the circuit substrate, and supplying a test current to the pad through the needle to test the circuit substrate.
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