首页>
外国专利>
Process for bonding in an atmosphere of a gas having a negative Joule-Thomson coefficient
Process for bonding in an atmosphere of a gas having a negative Joule-Thomson coefficient
展开▼
机译:在具有负焦耳-汤姆森系数的气体气氛中进行粘合的方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
The present invention relates to a process for direct bonding two substrates, comprising at least: (a) bringing the surfaces to be bonded of said substrates in close contact; and (b) propagating a bonding wave between said substrates, characterised in that said substrates are kept, during step (b), in an atmosphere of a gas having a negative Joule-Thomson coefficient at the temperature and pressure of said atmosphere.
展开▼