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Method and system managing execution of preventative maintenance operation in semiconductor manufacturing equipment
Method and system managing execution of preventative maintenance operation in semiconductor manufacturing equipment
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机译:管理半导体制造设备中的预防性维护操作的执行的方法和系统
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摘要
Provided are a method and a system for managing semiconductor manufacturing equipment. The method may be performed using an equipment computer and may include ordering to perform a preventive maintenance to a chamber and parts in the chamber, monitoring a result of the preventive maintenance to the chamber and the parts, and performing a manufacturing process using plasma reaction in the chamber, if the result of the preventive maintenance is normal. The monitoring the result of the preventive maintenance may include a pre-screening method monitoring the result of the preventive maintenance using electric reflection coefficients obtained from the chamber and the parts without using the plasma reaction.
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