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Method and apparatus for depositing copper-indium-gallium selenide (CuInGaSe2-cigs) thin films and other materials on a substrate
Method and apparatus for depositing copper-indium-gallium selenide (CuInGaSe2-cigs) thin films and other materials on a substrate
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机译:在基板上沉积铜铟镓硒(CuInGaSe2-cigs)薄膜和其他材料的方法和设备
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摘要
An apparatus for deposition of a plurality of elements onto a solar cell substrate that comprises: a housing; a transporting apparatus to transport the substrate in and out of the housing; a first tubing apparatus to deliver powders of a first elements to the housing; a first source material tube located outside of the housing and joined to a feeder tube of the tubing apparatus; a valve located inside of the first source material tube sufficient to block access between the first source material tube and the first feeder tube; a first heating tube located inside of the housing and connected to the first feeder tube; a similar second tubing apparatus to deliver powders of a second elements to the housing; a loading station for loading the substrate onto the transporting apparatus; one or more thermal sources to heat the housing and the first and second heating tube.
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