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Multi-dopant permeation tube with two chambers for introducing dopants into a spectrometry system
Multi-dopant permeation tube with two chambers for introducing dopants into a spectrometry system
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机译:具有两个腔室的多掺杂物渗透管,用于将掺杂物引入光谱系统
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摘要
Aspects and embodiments of the present invention are directed to spectrometry systems and for apparatus and methods for delivering dopants to same. In one example, there is provided a dopant delivery device configured to supply dopants to a spectrometry system comprising a tube including a first chamber and a second chamber, a first dopant source included in the first chamber, and a second dopant source included in the second chamber.
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