WATER-REACTIVE Al COMPOSITE MATERIAL, WATER-REACTIVE Al ALLOY SPRAY FILM, METHOD FOR MANUFACTURING Al ALLOY SPRAY FILM AND CONSTITUENT MEMBER FOR FILM DEPOSITION CHAMBER

摘要

A water-reactive Al composite material for spraying that is prepared by adding to Al 0.2-2 wt% (relative to the weight of Al, the same applies hereinafter) inclusive of Bi, 1.5-8 wt% inclusive of Si, 0.2-4 wt% inclusive of Ti, 0.2-2 wt% inclusive of Ce and 0.2-2 wt% inclusive of Mg. From this Al composite material, an Al alloy spray film is obtained. Then a constituent member for a film deposition chamber is coated with this Al alloy spray film.