REAL-TIME ANALYSIS AND CONTROL OF ELECTRON BEAM MANUFACTURING PROCESS THROUGH X-RAY COMPUTED TOMOGRAPHY

摘要

Electron beam manufacturing processes, and systems that perform the processes, are described that utilize real-time analysis and control of the electron beam manufacturing processes by detecting secondary x-rays that are generated as a result of the electron beam contacting a workpiece. The detected secondary x-rays are used to generate, in real-time, a three-dimensional cross-sectional image of the portion or region of the workpiece surrounding the location contacted by the electron beam. In addition, real-time analysis of the three- dimensional cross-sectional image can be used to detect defects and real-time re-work or correction of defects can be performed by directing an electron beam back to an area with a defect.