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GENERAL PLATFORM STRUCTURE FOR 8-INCH AND 12-INCH SUBSTRATES

机译:8英寸和12英寸基座的通用平台结构

摘要

A general platform structure for 8-inch and 12-inch substrates. In a case in which device components are not replaced, two production modes of products can be rapidly switched. The platform structure comprises a general device front-end module (2), a general load module (3), and a general wafer transfer module (4). General mechanical arm fingers (5) are used on a mechanical arm of the general device front-end module (2). The fingers have two layers of steps, a step B (9) is used for holding 8-inch wafers (7), and a step A (8) is used for holding 12-inch wafers (6), and accordingly, the general device front-end module (2) can take the 8-inch/12-inch wafer raw materials out of a wafer box and transfer the 8-inch/12-inch wafer raw materials to the load module (3), and can take the finished wafer products out of the load module and place the finished wafer products into the wafer box. Diversification of produced products can be achieved, one machine for multiple purposes meets different manufacturing requirements, and device purchase cost is reduced. The general platform structure has the characteristics: the general platform structure has a simple and practical structure, saves device adjustment time and improves the production capacity. The general platform structure can be widely used in the technical field of semiconductor film devices.
机译:用于8英寸和12英寸基板的通用平台结构。在不更换设备组件的情况下,可以快速切换产品的两种生产模式。平台结构包括通用设备前端模块(2),通用负载模块(3)和通用晶圆传送模块(4)。通用机械臂指状件(5)用于通用设备前端模块(2)的机械臂上。指状物具有两层台阶,台阶B(9)用于固定8英寸晶片(7),台阶A(8)用于固定12英寸晶片(6),因此,通常设备前端模块(2)可以从晶圆盒中取出8英寸/ 12英寸晶圆原料,并将8英寸/ 12英寸晶圆原料转移到装载模块(3),然后可以将晶片成品从装载模块中取出,然后将晶片成品放入晶片盒中。可以实现生产产品的多样化,一台用于多种用途的机器可以满足不同的制造要求,并降低了设备购买成本。通用平台结构具有以下特点:通用平台结构具有简单实用的结构,节省了设备调整时间,提高了生产能力。通用平台结构可广泛用于半导体膜器件的技术领域。

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