METHOD AND DEVICE FOR MEASURING SWING ANGLE OF PRECISE TURNTABLE

摘要

A method for measuring a swing angle of a precise turntable. The method comprises: fixing a precise turntable (4) on an interferometer five-dimensional adjustment table (5), placing standard optical flats (3) on the precise turntable (4), and enabling a reference plane (2) and the standard optical flats (3) to form a plane interference cavity; adjusting the positions of the standard optical flats (3) by means of the interferometer five-dimensional adjustment table (5), so that light beams emitted by an interferometer (1) form zero fringe interference between the reference plane (2) and the standard optical flats (3); rotating the precise turntable (4) to obtain surface shapes of n groups of standard optical flats (3); fitting the surface shapes of the n groups of standard optical flats (3) by using Zernike polynomial expressions, extracting second coefficients and third coefficients of the n groups of Zernike polynomial expressions and performing statistics collection on the second coefficients and the third coefficients of the Zernike polynomial expressions; and merging the second coefficients and the third coefficients of the Zernike polynomial expressions and performing statistics collection on the results obtained after the merging, and calculating a swing angel error in the rotation the precise turntable. An angle is measured by measuring a surface shape, and the measurement is not affected by surface shapes of optical flats, thereby improving the detection precision. Also disclosed is a device for measuring a swing angle of a precise turntable.