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MEASUREMENT TOOL AND METHOD FOR COATING THICKNESS ON LARGE-SIZED BASE PLATE

机译:大型基体板上涂层厚度的测量工具和方法

摘要

Disclosed are a measurement tool (100) and a method for measuring a coating thickness on a large-sized base plate using the measurement tool (100). The measurement tool (100) comprises: a measurement part (110), wherein the measurement part (110) is provided with at least one measurement surface, and at least one sampling substrate (400) can be positioned and fixed on the at least one measurement surface; and a supporting part (120), wherein the supporting part (120) is connected to the measurement part (110), and the supporting part (120) can be supported on a frame of a mask (300), so as to dispose the measurement part (110) inside the frame of the mask film (300) by means of the supporting part (120).
机译:公开了一种测量工具(100)以及使用该测量工具(100)测量大型基板上的涂层厚度的方法。该测量工具(100)包括:测量部分(110),其中该测量部分(110)设置有至少一个测量表面,并且至少一个采样基板(400)可以被定位并固定在该至少一个上测量面支撑部分(120),其中,所述支撑部分(120)连接至所述测量部分(110),并且所述支撑部分(120)可以支撑在掩模(300)的框架上,以放置所述掩模(300)。借助于支撑部分(120)在掩模膜(300)的框架内部的测量部分(110)。

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