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MEASUREMENT TOOL AND METHOD FOR COATING THICKNESS ON LARGE-SIZED BASE PLATE
MEASUREMENT TOOL AND METHOD FOR COATING THICKNESS ON LARGE-SIZED BASE PLATE
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机译:大型基体板上涂层厚度的测量工具和方法
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摘要
Disclosed are a measurement tool (100) and a method for measuring a coating thickness on a large-sized base plate using the measurement tool (100). The measurement tool (100) comprises: a measurement part (110), wherein the measurement part (110) is provided with at least one measurement surface, and at least one sampling substrate (400) can be positioned and fixed on the at least one measurement surface; and a supporting part (120), wherein the supporting part (120) is connected to the measurement part (110), and the supporting part (120) can be supported on a frame of a mask (300), so as to dispose the measurement part (110) inside the frame of the mask film (300) by means of the supporting part (120).
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