MECHANICALLY ROBUST OPTICAL MEASUREMENT SYSTEM BY MEANS OF A LIGHT TIME-OF-FLIGHT MEASUREMENT AND/OR A REFLECTIVITY MEASUREMENT

摘要

The invention relates to a measurement system and a measurement method for measuring test objects and/or arrangements of test objects, in particular of three-dimensional test objects and/or arrangements of test objects. The optical measurement system comprises at least one light source for emitting a transmission beam (30), a scanning or angle deflecting apparatus for scanning a test object (3) with the transmission beam (50) along two scanning axes, a reception device for detecting at least some of the transmission beam light (51) that was reflected and/or scattered by the test object and for generating at least one reception signal, wherein the reception device comprises at least one detector or one detector array (9); a tracking apparatus for tracking the transmission beam light (51) that was reflected and/or scattered by the test object (3) in the direction of the reception device, wherein the first of the two scanning axis is tracked optically and the second scanning axes is tracked electronically; and a signal processing device for processing the at least one reception signal in order to obtain information about the distance to individual measurement points of the test object (3) and/or about the reflectivity at individual measurement points of the test object (3). The tracking apparatus comprises a transmissive optical beam deflection arrangement (4, 5) which is designed to deflect in a synchronous manner with the scanning process along the first scanning axis the transmission beam light (51) that was reflected and/or scattered by the test object (3) in the direction of the reception device; and an imaging optical element (7), which is designed to image the light that propagated through the beam deflection arrangement (4, 5) onto the detector or the detector array (9). The tracking apparatus is further designed to switch different portions of the detector or of the detector array (9) in a synchronous manner with the scanning process along the second scanning axis, wherein the respectively switched portion is signal-connected to the signal processing device.