SURFACE ACOUSTIC WAVE (SAW)-BASED INERTIAL SENSOR, METHODS, AND APPLICATIONS

摘要

A SAW-based inertial sensor incorporates a curved SAW drive resonator and graphene electrodes to increase the Coriolis force on a pillar array and generate secondary SAW waves that create a strain-induced hyperfine frequency transition in an enclosed alkali atom vapor, in conjunction with an integrated FP resonator to measure very small inertial signals corresponding to 10 μg and 0.01 °/hr, representing a dynamic range of 10 orders of magnitude.