UHP SYSTEM AND METHOD FOR ULTRA HIGH PURITY UHP CARBON DIOXIDE PURIFICATION

摘要

The present invention relates in its first aspect to an ultra high purity (UHP) carbon dioxide purification system (20) and in its second aspect relates to a UHP carbon dioxide purification method. The present invention uses supported nickel oxide 23 and supported palladium oxide 24 wherein the upper section 211 of the purification system 20 is at least partially filled with supported nickel oxide 23, The lower compartment 212 is at least partially filled with the supported palladium oxide 24 wherein the upper and lower compartments 211 and 212 of the purification system 20 have physical separation but fluid communication.