Nanopore structure ionic device using nanopore structure and method of manufacturing nanomembrane structure

摘要

The present invention relates to a nanopore structure using a nanopore system formed on an insulating support member, a method for manufacturing the same, and an ionic device using the nanopore structure. The nanopore structure according to the present invention comprises: an insulating support member comprising at least one of silicon and a silicon-containing compound and having micropores penetrating from one side to the other side and formed at the central portion; and a nanopore membrane comprising silicon nitride (SiN), disposed on the insulating support member, and having nanopores smaller than the micropores at the central portion to thus may be communicate with the micropores. In the nanopore structure, the nanopore membrane and the insulating support member are attached to each other through hydrophilic surface treatment.