MPC MPCMask Process Correction verification method and method for fabricating mask comprising the MPC verification method

摘要

Provided is a mask process correction (MPC) verification method, which can verify accuracy of MPC, and a mask manufacturing method including the same. The MPC verification method according to the technical idea of the present invention comprises: a step of performing an MPC reflecting an error generated in a mask manufacturing process to mask tape out (MTO) design data for a mask pattern by using a mask process model; and a step of performing a verification of the MPC by outputting a two-dimensional contour for the mask pattern by using the mask process model.