THICKNESS MEASURING DEVICE FOR TRANSPARENT PLATE, THICKNESS MEASURING SYSTEM FOR TRANSPARENT PLATE INCLUDING SAME, AND OPERATION METHOD FOR SAME

摘要

Disclosed are a thickness measuring device for a transparent plate, a thickness measuring system for a transparent plate including the same and an operation method for the same. According to the embodiment of the present invention, the thickness measuring device (100) for a transparent plate, which is a device (100) for measuring the thickness of a transparent plate, includes: a reference transparent plate (110) mounted to be adjacent to a laser generation unit (120), wherein a laser generated by the laser generation unit (120) penetrates the reference transparent plate (110); the laser generation unit (120) individually radiating the laser to the reference transparent plate (110) and the transparent plate (10) to be measured; an interference pattern obtaining unit (130) obtaining an interference pattern by collecting the laser passing through the reference transparent plate (110) and the transparent plate (10) to be measured; and a control unit (140) calculating comparison data by calculating a phase difference based on interference pattern data obtained by the interference pattern obtaining unit (130) and comparing the thickness of the transparent plate (10) to be measured with the reference transparent plate (110). According to the present invention, the thickness measuring device for a transparent plate measures the thickness of the transparent plate in a noncontact type using digital holography.;COPYRIGHT KIPO 2017