METHOD OF MANUFACTURING OF LINBO3 SUBSTRATE FOR OPTICAL MODULATOR

摘要

The present invention relates to a method of manufacturing a lithium niobate (LiNbO_3) substrate for an optical modulator, and more specifically, to a method of manufacturing of a liNbO_3 substrate for an optical modulator, allowing an LiNbO_3 substrate where a titanium (Ti) diffusive waveguide is formed to undergo an etching process using sulfur hexafluoride (SF_6) gas and helium (He) gas, thereby reducing the surface refractive index. According to the present invention, in the method of manufacturing a LiNbO_3 substrate for an optical modulator, an etching process is performed by alternately injecting SF_6 gas and He gas such that lithium (Li) can be removed for a short time. Thus, the present invention not only shortens the process time but also prevents the formation of by-products such as lithium fluoride (LiF).;COPYRIGHT KIPO 2017