METHOD FOR MANUFACTURING FIELD EFFECT TRANSISTOR TYPE BIO SENSOR ARRAY AND METHOD FOR MANUFACTURING FIELD EFFECT TRANSISTOR TYPE BIO SENSOR ARRAY INCLUDING MICROFLUDIC

摘要

Disclosed is a method for manufacturing a field effect transistor type bio sensor array, capable of preventing foreign substances which may be generated during a manufacturing process, from being attached to the surface of a two-dimensional nano-material channel layer. The method for manufacturing a field effect transistor type bio sensor array includes: a step of arranging the channel layer formed of a two-dimensional nano-material on a substrate; a step of arranging a sacrificial layer on the channel layer; a step of arranging a first photoresist on the sacrificial layer and forming a first pattern by exposing the first photoresist with light; a step of forming multiple nano-material structures corresponding to the first pattern on the substrate by using the first photoresist patterned as a mask and etching the sacrificial layer and the channel layer; a step of forming a second pattern by arranging a second photoresist on the multiple nano-material structures and exposing the second photoresist with the light; a step of forming an area in which a source electrode and a drain electrode are individually formed on the channel layer of the multiple nano-material channel layers by using the patterned second photoresist as the mask and etching the sacrificial layer of the multiple nano-material structures; a step of individually forming the source electrode and the drain electrode on the channel layer of the multiple nano-material structures; a step of arranging a protection layer individually protecting the substrate, the source electrode, and the drain electrode; and a step of exposing the channel layer between the source electrode and the drain electrode by using the protection layer as the mask.;COPYRIGHT KIPO 2017