SYSTEM TO DETECT DEFECT OF SUBSTRATE USING LASER SENSOR UNIT AND METHOD TO DETECT DEFECT OF SUBSTRATE USING SAME

摘要

An embodiment of the present invention relates to a system to detect a defect of a substrate using a laser sensor unit, and a method to detect a defect of a substrate using the same. According to an embodiment of the present invention, the system to detect a defect of a substrate using a laser sensor unit comprises: a substrate transport unit which transports the substrate; a filming unit distanced from the substrate transported by the substrate transport unit for a preset distance, filming a surface of the substrate; a light source placed to face the filming unit; the laser sensor unit placed near the filming unit; a distance control unit which controls a distance between the filming unit and the substrate; and a control unit which controls an operation of the substrate transport unit, the filming unit, the light source, the laser sensor unit, and the distance control unit. The laser sensor unit is capable of measuring the distance from the laser sensor unit to the transported substrate in real time. The present invention aims to provide a system to detect a defect of a substrate using a laser sensor unit and a method to detect a defect of a substrate using the same, capable of minimizing a rate of error in detecting a defect.;COPYRIGHT KIPO 2017