RF -RF APPARATUSES AND METHODS FOR AVOIDING ELECTRICAL BREAKDOWN FROM RF TERMINAL TO ADJACENT NON-RF TERMINAL

摘要

The isolation system includes an input junction coupled to one or more RF power supplies via a matching network to receive radio frequency (RF) power. The isolation system further includes a plurality of channel paths coupled to the input junctions for distributing RF power between the channel paths. The isolation system includes an output junction that is coupled to the electrodes of the plasma chamber to receive portions of the distributed RF power between each of the channel paths and to output the combined power and to provide the combined RF power to the electrodes. Each of the channel paths includes a bottom capacitor and a top capacitor for blocking a different type of signal than the RF power. The isolation system prevents the risk of electrical arcing caused by the voltage difference between the RF terminal and the non-RF terminal when the RF terminal and the non-RF terminal are disposed adjacent to each other.