ACTUATOR FOR DYNAMICALLY CONTROLLING TILTING OF SHOWER HEAD INSIDE SEMICONDUCTOR PROCESSING DEVICE

摘要

The present invention provides a shower head module control mechanism supporting a shower head module inside an upper end plate of a semiconductor substrate processing device. The shower head module control mechanism can be dynamically operated to control planarization of a facing plate of the shower head module with respect to an upper surface of a substrate pedestal module adjacent to the facing plate inside the semiconductor processing device.;COPYRIGHT KIPO 2017