METHOD TO PRODUCE MULTI-LAYERED HEXAGONAL BORON NITRIDE NANOCOMPOSITE USING SAPPHIRE SUBSTRATE

摘要

Provided by the present invention is a multi-layered hexagonal boron nitride nanocomposite by using a sapphire substrate. The method of the present invention comprises: a first step of forming borazine by heating ammonia borazine; and a second step of arranging a sapphire substrate on a reactor and forming a multi-layered hexagonal boron nitride on the sapphire substrate by inputting the borazine and hydrogen and thermally treating the inputted borazine and hydrogen. Thus, the multi-layered hexagonal boron nitride can be produced in a large area to have a single crystal orientation of high quality through a low pressure chemical vapor deposition unlike a case of forming h-BN using an existing metal catalyst. A multi-layered h-BN layer directly formed on a sapphire substrate can be used as a substrate of an electric device and a graphene field effect transistor (FET) by having a smooth surface and high electron mobility.;COPYRIGHT KIPO 2017