ALIGNMENT METHOD OF EXPOSURE TABLES FOR EXPOSURE DEVICE

摘要

Provided is an alignment method of exposure tables for an exposure device. The alignment method of exposure tables for an exposure device comprises: a step in which a pair of first and second exposure tables are aligned in parallel near the front of a work stage installed to allow an exposure lens and a pair of first and second alignment cameras to perform a linear motion; an exposure lens transport step in which after a product is loaded on the first exposure table, the exposure lens is moved to be out of the moving path of the first alignment camera; a first alignment step in which the first alignment camera is transported to carry out alignment of the product loaded on the first exposure table; a first exposure step in which the product of the first exposure table which has been aligned by transporting the exposure lens is exposed; a second alignment step in which while the first exposure step is carried out, the second alignment camera is transported to the second exposure table to carry out alignment of a product loaded on the second exposure table; a second exposure step in which the exposure lens having completed exposure in the first exposure step is transported to expose the product loaded on the second exposure table; and a product loading step in which the products are unloaded from the first and second exposure tables, having completed the first exposure step and the second exposure step, and new products are loaded thereon. Accordingly, the exposure operation and the product alignment operation are carried out alternately between the work stage and the pair of exposure tables, and thus the preparation time for the exposure operation is reduced, and work productivity is increased.;COPYRIGHT KIPO 2017