NbO2 NbO2 NbO2 SINTERED BODY SPUTTERING TARGET COMPRISING SINTERED BODY AND METHOD OF PRODUCING NbO2 SINTERED BODY

摘要

The present invention is characterized in that the intensity ratio of the X-ray diffraction peak intensity from the (001) plane or the (110) plane of Nb ₂ O ₅ to the X-ray diffraction peak intensity from the (400) plane of NbO ₂ is 1% To a sintered body of NbO ₂ . An object of the present invention is to provide an NbO ₂ sintered body which can be applied to a sputtering target for forming a high-quality resistance change layer for ReRAM without using expensive NbO ₂ raw material. In particular, it is an object of the present invention to provide a high-density, single-phase NbO ₂ sintered body suitable for stabilizing sputtering.