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METHOD AND APPARATUS FOR PRODUCING RASTER IMAGE USEABLE IN EXPOSURE APPARATUS BASED ON DMD AND RECORDING MEDIUM FOR RECORDING PROGRAM FOR EXECUTING THE METHOD
METHOD AND APPARATUS FOR PRODUCING RASTER IMAGE USEABLE IN EXPOSURE APPARATUS BASED ON DMD AND RECORDING MEDIUM FOR RECORDING PROGRAM FOR EXECUTING THE METHOD
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机译:基于DMD和记录介质的用于曝光设备的光栅图像的生成方法和装置,用于执行该方法的记录程序
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摘要
A method for generating a raster image usable in a DMD-based exposure apparatus according to an embodiment of the present invention includes: a step of superposing a plurality of virtual pixel arrays to generate a superposed pixel array; a step of mapping the superimposed pixel array onto a virtual vector image; a step of generating a superimposed raster image by determining on/off of all pixels in the superimposed pixel array mapped onto the vector image; and a step of converting the superimposed raster image into one raster image.
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