The A method for enhancing thermoelectric properties of thermoelectric materials and thermoelectric materials using the same

摘要

The present invention provides a method of manufacturing a semiconductor device, comprising: (1) immersing a thermoelectric material formed on a substrate in an acidic solution; Washing the thermoelectric material of step 1 (step 2); And heat treating the thermoelectric material in step 2 (step 3). The thermoelectric characteristics of the thermoelectric material obtained by the method of manufacturing a thermoelectric material according to the present invention are remarkably increased by chemical treatment using an acidic solution. In addition, the manufacturing method of the present invention can be performed only by a process of immersing a thermoelectric material in an acidic solution, and does not have a difficult influence on the formation of a thin film, so that it can be applied to thermoelectric devices of various substrates and size.