3 Method for 3D shape measuring using of Triple Frequency Pattern

摘要

The present invention relates to a three-dimensional shape measuring method using a triple frequency pattern, in which at least one projector irradiates an inspection object with a pattern illumination, and then a three-dimensional shape A three-dimensional shape measuring method using a triple frequency pattern performed by a measuring apparatus, comprising: generating first to third reference pattern data having different periods; The first to third reference pattern data corresponding to the loaded first to third reference pattern data are loaded on the surface of the inspected object,; Capturing a plurality of first to third pattern images by photographing a surface of the inspection object irradiated with the first to third reference pattern lights from at least one camera; Selecting two pattern images having different periods from the first through third pattern images according to the measurement range of the inspection object; And calculating height information for the inspected object by extracting phase information from the selected two pattern images and calculating the phase-height equation. Accordingly, the present invention solves the ambiguity of 2 With respect to the inspection object having various heights, and simultaneously calculates the height information of the inspection object by selecting two pattern images having different periods according to the inspection area or property information of the inspection object The measurement accuracy can be improved and the inspection speed can be improved compared to the conventional method.;