OXIDE SINTER METHOD FOR PRODUCING SAME TARGET AND TRANSPARENT CONDUCTIVE FILM

摘要

The present invention relates to a sputtering target capable of realizing a high-speed film formation and a non-nodule of a transparent conductive film suitable for a blue LED or a solar cell, an oxide sintered object optimum for obtaining the same, and a manufacturing method thereof.1. A cerium-zirconium composite oxide comprising indium and cerium as an oxide and at least one metal element (M element) selected from the group consisting of titanium, zirconium, hafnium, molybdenum and tungsten, (Ce + M) atomic ratio of 0.3 to 9 atomic%, M element content of 1 atomic% or less in terms of M / (In + Ce + M) atomic ratio, In + Ce + M) atomic ratio of 9 atomic% or less, and the oxide sintered body is a bixbyite-type In₂O₃Phase forms a main crystal phase, and as a second phase, a fluorite type structure of CeO₂Phase is an oxide sintered material finely dispersed as crystal grains having an average grain size of 3 or less;An oxide powder of element M is added to and mixed with the indium oxide powder and the cerium oxide powder raw material powder and the average particle diameter of the raw powder is 1.5 m or less and the powder is sintered according to a normal pressure sintering method, And a method for producing an oxide sintered body in which a mixed powder is formed and sintered according to a hot press method.