A PRECURSOR CONTAINING TRANSITION METAL PREPARING METHOD THEREOF AND USE THEREOF

摘要

The present invention relates to a transition metal-containing precursor, a process for producing the same, and a process for producing a thin film using the same, wherein the transition metal-containing precursor according to the present invention is improved in thermal stability and volatility so that a high quality cobalt oxide or manganese It is possible to manufacture a thin film containing an oxide.